Molecular-absorption-induced thermal bistability in PECVD silicon nitride microring resonators
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride | Langmuir
Atomic layer deposition of silicon nitride from bis(tertiary-butyl- amino)silane and N2 plasma studied by in situ gas phase and
Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films: Journal of Applied Physics: Vol 104, No 10
Understanding the Role of Concentrated Phosphoric Acid Solutions as High-Temperature Silicon Nitride Etchants
Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications
Figure 4 | Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films
FTIR spectrum of a a typical ETP deposited silicon nitride coating... | Download Scientific Diagram
IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma-Enhanced C
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride | Langmuir
FTIR spectrum of PECVD silicon nitride film after RTA at1400 o C for 3'. | Download Scientific Diagram
FTIR spectra of silicon nitride films deposited at different ECR powers. | Download Scientific Diagram
Low‐Stress Silicon Nitride Platform for Mid‐Infrared Broadband and Monolithically Integrated Microphotonics - Lin - 2013 - Advanced Optical Materials - Wiley Online Library
Figure 19 from Making Silicon Nitride Film a Viable Gate Dielectric | Semantic Scholar
FTIR spectrum of XF0 and of the resulting silicon nitride ceramics... | Download Scientific Diagram
Silicon nitride: a potent solid-state bioceramic inactivator of ssRNA viruses | Scientific Reports
Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films: Journal of Applied Physics: Vol 104, No 10
Luminescent Devices Based on Silicon-Rich Dielectric Materials | IntechOpen
Silicon nitride density estimation with FTIR, Ellipsometry and BHF -
FTIR spectra for the as-deposited and 800 ° C anneal silicon-rich... | Download Scientific Diagram
Ultra-low temperature silicon nitride photonic integration platform
Deposition of silicon nitride films using chemical vapor deposition for photovoltaic applications - ScienceDirect
Understanding the Role of Concentrated Phosphoric Acid Solutions as High-Temperature Silicon Nitride Etchants
Cleaning Solutions for Removal of ∼30 nm Ceria Particles from Proline and Citric Acid Containing Slurries Deposited on Silicon
CHARACTERIZATION OF SILICON NITRIDE LAYERS DEPOSITED IN THREE-ELECTRODE PLASMA-ENHANCED CVD CHAMBER
