5.4 Wafer-to-Wafer Metal Sputter Deposition Process Control by Automatic Deposition Rate Adjustment
Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering - ScienceDirect
Gencoa Rate Calculation // Gencoa
Deposition rates of high power impulse magnetron sputtering: Physics and economics: Journal of Vacuum Science & Technology A: Vol 28, No 4
Optimization of the Sputtering Process for Depositing Composite Thin Films
On the Deposition Rate of Magnetron Sputtered Thin Films at Oblique Angles
Sputtering Yield Rates
Dependence of deposition rate on the deposition gas pressure, for three... | Download Scientific Diagram
a) Sputtering deposition rate (nm/min) of ZrO 2 and (b) RF power... | Download Scientific Diagram
Thickness distribution of sputtered films on curved substrates for adjustable x-ray optics
Deposition Rate Effect on Optical and Electrical Properties of Thermally Evaporated WO3−x/Ag/WO3−x Multilayer Electrode for Transparent and Flexible Thin Film Heaters | Scientific Reports
Q & A | Sputtering Components
Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance: Review of Scientific Instruments: Vol 87, No
Sputtering Processes for Thin Film Deposition - ppt video online download
Role of the reactive sputtering deposition power in the phase control of cobalt oxide films
Sputtering Processes for Thin Film Deposition - ppt video online download
Atomic-scale diffusion rates during growth of thin metal films on weakly-interacting substrates | Scientific Reports
SciELO - Brasil - Elaboration of nitride thin films by reactive sputtering Elaboration of nitride thin films by reactive sputtering
Effect of the Sputtering Power on the Structure, Morphology and Magnetic Properties of Fe Films
Sample deposition rate vs time in 30 mTorr Ar plasma with 50 W dc... | Download Scientific Diagram
Section 5 Thin Film Deposition part 1 sputtering
Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance: Review of Scientific Instruments: Vol 87, No
Effects of temperature and deposition time on the RF- sputtered CdTe films preparation
Deposition Rate - an overview | ScienceDirect Topics